| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean oven where the amount of electrical energy being consumed by a heater has been reduced and hence the load of the heater has been reduced, and its usage. SOLUTION: In the clean oven having a circulation system of hot air returning to a clean bath 1 again through a heating means 3 from the clean bath 1, a supply system 16 for introducing the clean air from the outside to the circulation system, and an exhaust system 13 for unloading the hot air of the circulation system from the circulation system to the outside, a heat exchanger 10 is provided to preliminarily heat the clean air by the hot air of the exhaust system and then to introduce the clean air to the circulation system.
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