发明名称 ACCELERATION METER UTILIZING ENERGY CONFINEMENT TYPE PIEZOELECTRIC VIBRATION
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric type acceleration meter that is compact, has simple structure, can be manufactured easily, is accurate, and can also measure dynamic acceleration. SOLUTION: First and second electrodes in a strip shape are provided in parallel at a specific interval each other on the main surface of a part with polarization in the thickness direction of a piezoelectric plate, and a piezoelectric vibrator for generating energy confinement type vibration at the piezoelectric plate part between both electrodes by exciting the piezoelectric plate while applying a drive AC voltage for excitation between the first and second electrodes is used, thus detecting acceleration being applied in a direction that orthogonally crosses the main surface of the piezoelectric plate as an electrical signal by electrically detecting the change in the energy confinement type vibration due to the distortion of the piezoelectric plate that is generated by acceleration.
申请公布号 JP2001116764(A) 申请公布日期 2001.04.27
申请号 JP19990296742 申请日期 1999.10.19
申请人 TOKIN CORP 发明人 ABE HIROSHI
分类号 H01L41/08;G01C19/56;G01P15/09;G01P15/10 主分类号 H01L41/08
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