发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device having improved characteristics and reliability. SOLUTION: This semiconductor device is provided with an insulation substrate, a semiconductor film containing a region that is formed at the upper portion of the insulation substrate and has added P-type or N-type impurities, a gate insulation film that is formed in contact with the semiconductor film, a gate electrode where a side surface formed in contact with the gate insulation film is into a tapered shape, an interlayer insulation film formed at the upper portion of the gate electrode, and wiring that is formed on the interlayer insulation film and is connected to a region, where the P-type or N-type impurities have been added.</p>
申请公布号 JP2001119037(A) 申请公布日期 2001.04.27
申请号 JP20000249314 申请日期 2000.08.21
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;CHO KOYU;TAKEMURA YASUHIKO
分类号 G02F1/1368;G02F1/136;G09F9/30;H01L21/20;H01L21/8238;H01L27/08;H01L27/092;H01L29/786;(IPC1-7):H01L29/786 主分类号 G02F1/1368
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