| 摘要 |
PROBLEM TO BE SOLVED: To increase temperature to a desired one without requiring large power even if liquid with a large heat capacity is used as washing liquid in the case of washing treatment while treatment in the case of draining the washing liquid is simple. SOLUTION: Sulfuric acid is received by a first outer bath 2a when it is overflowed from an inner bath 1. The sulfuric acid being accumulated in the first outer bath 2a, and that in the inner bath 1 that has already been used are supplied to a second outer bath 2b through piping 5. DIW is supplied to the second outer bath 2b through a DIW supply line 10. In the second outer bath 2b, DIW is supplied to the sulfuric acid, and the sulfuric acid reacts with DIW to generate reaction heat. As a result, the inner bath 1 being accommodated in the second outer bath 2b is heated by the generated reaction heat.
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