| 摘要 |
PROBLEM TO BE SOLVED: To provide structure by which an optical switching element with resin structure on the upper part of its actuator can be manufactured by easy processes. SOLUTION: An electrode part 7 with high rigidity and an elastic part 15 with flexible structure are formed by reinforcing an A1 layer 33 to constitute an upper electrode 7 of an actuator part 6 using electrostatic force by supporting structure 5 of a switching part 3 to be driven by the actuator. The electrode part 7 and the elastic part 15 can be formed by one layer and the actuator 6 can be formed by two structural layers together with a lower electrode 8 to be formed on a substrate 20. Sacrificial layers 32 and 34 in the case of forming the actuator 6 or a resin optical element part 3 can be removed by fluorinated gas 48 without affecting the optical element part 3, the semiconductor substrate 20, etc., by forming the sacrificial layers by amorphous silicon.
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