发明名称 VIBRATION ACTUATOR
摘要 PROBLEM TO BE SOLVED: To provide a longitudinal torsion ultrasonic actuator that has few number of partitems and can be rotated in the forward and backward directions. SOLUTION: This ultrasonic actuator for taking out drive force by cumbinring longitudinal vibration and torsional vibration is provided with an elastic boy 14, a torsional conversion part 12A that is formed at one portion of the elastic body 14 and generates torsional vibration by receiving expansion and contraction deformation, and piezoelectric elements 16a and 16a' for torsional excitation for generating expansion and contraction deformation, while being provided on the outer surface of the torsional conversion part 12A of the elastic body 14.
申请公布号 JP2001119970(A) 申请公布日期 2001.04.27
申请号 JP19990295337 申请日期 1999.10.18
申请人 NIKON CORP 发明人 SUGAYA ISAO
分类号 H01L41/09;H02N2/00 主分类号 H01L41/09
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