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发明名称
Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate fabrication method
摘要
申请公布号
AU732569(B2)
申请公布日期
2001.04.26
申请号
AU19980081902
申请日期
1998.08.26
申请人
CANON KABUSHIKI KAISHA
发明人
TORU TAKISAWA;TAKAO YONEHARA;KENJI YAMAGATA
分类号
H01L21/683;H01L21/00;H01L21/02;H01L21/20;H01L27/12;(IPC1-7):H01L21/68
主分类号
H01L21/683
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代理人
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