发明名称 Electromechanical component for sensors, controllers and similar items, comprises mechanically active section which is at least partly coated with metal layer and incorporates flexural spring elements
摘要 Electromechanical component comprises a mechanically active section which is at least partly coated with a metal layer and incorporates flexural spring elements. The electromechanical component (10) for sensors, controllers and similar items comprises a polymer body (12) with a frame (18) and a mechanically active section (14a, 14b, 14c) which is at least partly coated with a metal layer (30), and includes a flexural spring elements (14a, 14b) connecting the frame with a movable mass (14c). The metal layer serves for mechanical strengthening of the spring and, with the exception of the connection points at the frame and at the mass, almost totally envelops it. An Independent claim is also included for: a method for producing such an electromechanical component. It includes formation of a metal layer which almost totally envelops the spring elements.
申请公布号 DE19948613(A1) 申请公布日期 2001.04.26
申请号 DE19991048613 申请日期 1999.10.08
申请人 HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE FORSCHUNG E.V. 发明人 KUECK, HEINZ;GIOUSOUF, METIN
分类号 H03H9/24;(IPC1-7):B81B3/00;B81C1/00;F04B43/04;F04B45/047;H01L51/20;H01L51/40 主分类号 H03H9/24
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