| 摘要 |
PROBLEM TO BE SOLVED: To perform positioning of the order of microns, in a very thin planar driving actuator. SOLUTION: In a stator 10, a fluctuating portion 13 is formed by an etching processing in a top-surface plate 11 to provide first and second stationary electrodes 15A, 15B respectively in a bottom-surface plate 12 so as to oppose them to first and second fluctuating electrode portions 13E, 13F of the fluctuating portion 13. By applying respectively voltages to the stationary electrodes 15A, 15B, electrostatic forces are generated actively between the stationary electrode 15A and the first fluctuating electrode portion 13E and between the stationary electrode 15B and the second fluctuating electrode portion 13F. As a result, the fluctuating portion 13 is fluctuated with a planar moving plate supported by a support surface 13D of the fluctuating portion 13 which is moved in parallel with the stator 10.
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