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发明名称
Behandlungsverfahren mittels elektrischer Entladung sowie Einrichtung und Elektrode zur Durchführung des Verfahrens
摘要
申请公布号
DE19882915(T1)
申请公布日期
2001.04.26
申请号
DE19981082915T
申请日期
1998.03.16
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
GOTO, AKIHIRO;MORO, TOSHIO
分类号
C23C26/00;(IPC1-7):C23C26/00
主分类号
C23C26/00
代理机构
代理人
主权项
地址
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