Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.
申请公布号
WO0129145(A1)
申请公布日期
2001.04.26
申请号
WO2000US23797
申请日期
2000.08.30
申请人
SAINT-GOBAIN CERAMICS & PLASTICS, INC.
发明人
GARG, AJAY, K.;TANIKELLA, BRAHMANANDAM, V.;DELANEY, WILLIAM, R.