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发明名称
PARTICLE BEAM DEVICE
摘要
申请公布号
JPS5465482(A)
申请公布日期
1979.05.26
申请号
JP19770132085
申请日期
1977.11.02
申请人
FUJITSU LTD
发明人
KARIYA NORIJI;TOYAMA JIROU;TAKAOKA HIROMI
分类号
H01S1/00;G04F5/14;H01L21/26;H03L7/26;H05H3/02
主分类号
H01S1/00
代理机构
代理人
主权项
地址
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