METHOD FOR PRODUCING SURFACE ACOUSTIC WAVE SENSORS AND SUCH A SURFACE ACOUSTIC WAVE SENSOR

摘要

The invention relates to a method for producing surface acoustic wave sensors on the basis of surface acoustic wave components and to a corresponding surface acoustic wave sensor. The aim of the invention is to provide a method which allows the production of a homogeneous sorption polymer layer and which provides a sensor with a homogeneous sorption polymer layer. To this end, a polymeric parylene film with a thickness ranging between 20 and 200 nm is applied to the surface of the surface acoustic wave component by deposition from the gas phase, thereby rendering the in itself hydrophilic sensor surface hydrophobic. A hydrophobic sorption polymer layer is applied to the parylene film by spray-coating or drip-coating or by applying a hydrophilic sorption polymer layer to the parylene film by spray-coating or drip-coating once the parylene film is hydrophilized by plasma activation.