摘要 |
<p>An oxide superconductor (22) characterized as comprising a polycrystalline substrate (A), a polycrystalline thin film (B) formed on the surface thereof to have a formed film, and an oxide superconductor layer (C) formed on the film, wherein the polycrystalline thin film (B) comprises crystal grains (20) having a crystal structure of C type of a rare earth oxide represented by an empirical formula such as Y2O3 or Sc2O3, and the gain boundary canted angles which are formed by same crystal axes of grains (20) along a plane parallel to the surface of the polycrystalline substrate to have a formed film thereon are 30° or less. The polycrystalline thin film (B) is formed by the ion beam assisting method. After the formation of the polycrystalline thin film (B), the oxide superconductor layer (C) is formed.</p> |