发明名称 UPRIGHT HEAT-TREATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an upright heat-treating device for heat-treating an object to be heat-treated in clean environment while the inside of a furnace cannot be contaminated easily by dust. SOLUTION: In the upright heat-treating device that is composed so that it heat-treats an object to be heat-treated while the object is being carried in a perpendicular direction, the object is successively transferred from first to (N-1)th rising-side fixed shelves 8 to shelves that are one shelf above from the first rising-side fixed shelves to the Nth fixing side fixed shelf 8 for rising due to the operation of first to (N+1)th carrying arms 12, reaches a fixed shelf 10 for passing, passes through the fixed shelf 10 for passing, and then is successively transferred from second to Nth lowering side fixed shelves 9 to those that are one shelf down from N-type lowering side fixed shelves 9 to the first lowering side fixed shelves 9 for lowering.
申请公布号 JP2001116464(A) 申请公布日期 2001.04.27
申请号 JP19990296428 申请日期 1999.10.19
申请人 GLOBAL:KK 发明人 TACHIKAWA NORIYOSHI
分类号 H01L21/324;F27B9/24;(IPC1-7):F27B9/24 主分类号 H01L21/324
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