发明名称 Organizing substrates involves inserting substrates of second group between those of first group whilst withdrawing second substrates from second container to form third substrate group
摘要 The method involves acquiring a first group of substrates at regular intervals from a first container, moving the group to above a second container with a second group of substrates at regular intervals, positioning the substrates in the first group between these of the second group, inserting the second substrates between the first substrates whilst withdrawing the second substrates from the second container to form a third group. Independent claims are also included for the following: an arrangement for organizing substrates.
申请公布号 DE10041790(A1) 申请公布日期 2001.04.26
申请号 DE2000141790 申请日期 2000.08.25
申请人 TOKYO ELECTRON LTD., TOKIO/TOKYO 发明人 KOGUCHI, AKIRA
分类号 H01L21/68;B65G49/07;H01L21/00;H01L21/677;(IPC1-7):B65G49/07 主分类号 H01L21/68
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