| 摘要 |
PURPOSE:To produce ultra fine granules of a uniform granular size with high reproducibility by forming a gas current in a vacuum container and by continuously supplying substance vapors, through ducts, to be microgranulated. CONSTITUTION:Vacuum container 21 is evacuated to a high vacuum, and an inert gas is fed to chamber 21' from supply inlet 30 and forced to flow uniformly through partition plate 22. Power is supplied to boats 26, 26' to evaporate substances 25, 25', and the vapors are supplied to chamber 21'' from supply inlets 27, 27' of ducts 24, 24'. In chamber 21'' the vapors collide against molecules in the inert gas current and are microgranulated. The resulting ultra fine granules are carried to chamber 21' through the holes of plate 22 with the gas current, and they efficiently adhere to substrates 23. By this method the effect of inert gas convection is eliminated, and the amt. and granular size of ultra fine granules adhered are uniformly distributed. |
