发明名称 OPTICAL QUARTZ GLASS
摘要 PROBLEM TO BE SOLVED: To obtain quartz glass having excellent durability to optical glass due to transmission of ultraviolet rays having high power from excimer laser, etc. SOLUTION: This optical synthetic quartz glass has 2261-2270 cm-1 wavenumbers of absorption peaks in the vicinity of 2260 cm-1 of infrared ray absorption spectrum and <200 ppm OH group content based on weight ratio.
申请公布号 JP2001114528(A) 申请公布日期 2001.04.24
申请号 JP19990294930 申请日期 1999.10.18
申请人 SUMITOMO METAL IND LTD 发明人 MINAGAWA KAZUHIRO;FUKUSHIMA KENSUKE
分类号 H01L21/027;C03B19/14;C03B20/00;C03C3/06;C03C4/08;G02B1/00;G02B1/02;(IPC1-7):C03C3/06 主分类号 H01L21/027
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