MANUFACTURE OF DEVICE HAVING STRUCTURE ON SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method capable of manufacturing an optical switching element having a structure of resin in an upper part of an actuator. SOLUTION: Sacrifice layers 32, 34 when forming an actuator part 6 or a resin optical element part 3 are formed of amorphous silicon so that the sacrifice layers 32, 34 can be removed by fluorinated gas 48 without exerting influence on the optical element part 3 and a semiconductor substrate 20.