发明名称 Method for fabricating a transistor having a variable threshold voltage
摘要 A method for fabricating a transistor having a variable threshold voltage is disclosed. Energy levels of a transistor can be represented by a valance band, a conduction band, and a Fermi level. In order to fabricate a transistor with a variable threshold voltage, a region of the transistor is initially doped with a first dopant having a first energy level below the Fermi level. The region of the transistor is subsequently doped with a second dopant having a second energy level above the Fermi level. Alternatively, the region of the transistor can be initially doped with a first dopant having a first energy level above the Fermi level, and then the region of the transistor can be subsequently doped with a second dopant having a second energy level below the Fermi level.
申请公布号 US6221707(B1) 申请公布日期 2001.04.24
申请号 US19990282271 申请日期 1999.03.31
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 GHOSHAL UTTAM SHYAMALINDU
分类号 H01L27/092;H01L21/8238;H01L29/10;H01L29/167;H01L29/786;(IPC1-7):H01L21/823 主分类号 H01L27/092
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