发明名称 POLYCRYSTAL THIN FILM AND METHOD FOR PRODUCING THE SAME AND OXIDE SUPERCONDUCTIVE CONDUCTOR AND METHOD FOR PRODUCING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a polycrystal thin film which can arrange the axes c of the crystal axes of the C type crystal grains of a rare earth element oxide such as Y2O3 at a right angle based on the coating film-forming surface of a substrate, can simultaneously arrange the axes a and axes b of the crystal axes of the crystal grains in parallel to the film-forming surface, and has an excellent crystal orienting property. SOLUTION: This polycrystal thin film B consists mainly of oxide crystal grains 20 having the C type crystal structure of a rare earth element oxide represented by either composition formula of Y2O3, Sc2O3, Nd2O3, Sm2O3, Eu2O3, Gd2O3, Tb2O3, Dy2O3, Ho2O3, Er2O3, Yb2O3, Lu2O3, and Pm2O3 formed on the film-forming surface of the polycrystal substrate A. Therein, grain boundary inclination angles formed by the same crystal axes of the crystal grains of the polycrystal thin film along a surface parallel to the film-forming surface of the polycrystal substrate are <=30 degree.</p>
申请公布号 JP2001114594(A) 申请公布日期 2001.04.24
申请号 JP19990295977 申请日期 1999.10.18
申请人 FUJIKURA LTD;INTERNATL SUPERCONDUCTIVITY TECHNOLOGY CENTER 发明人 IIJIMA YASUHIRO;KIMURA MARIKO;SAITO TAKASHI
分类号 C30B29/22;C30B23/02;H01B12/06;H01L39/24;(IPC1-7):C30B29/22 主分类号 C30B29/22
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