| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond thin film system by which the adhesion between a diamond-containing carbon film or a diamond film and a substrate is strengthened, and which is enough in practicality. SOLUTION: In the method for depositing diamondlike carbon, by heating diamondlike carbon in contact with a substrate in an oxygen atmosphere in an evacuated state, an intermediate layer is formed on the space between the substrate and the diamondlike carbon. |
