| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic resistor composed of a sintered aluminum nitride/titanium nitride composite material suitable for a high-voltage large-capacity power circuit to suppress the load variation and provide its production process. SOLUTION: The ceramic resistor is composed of a sintered AlN/TiN composite material composed of >=70 vol.% AlN, 3-5 vol.% sintering assistant, 10-20 vol.% TiN and 5-15 vol.% Cr2O3 and has a specific resistance of 10-2 to 102 Ωcm, a temperature coefficient of resistance of >=+0.01%/ deg.C in the temperature range of room temperature to 100 deg.C and a thermal conductivity of >=40 W/mK. The resistor is produced by mixing >=70 vol.% AlN, 3-5 vol.% sintering assistant, 10-20 vol.% TiN and 5-15 vol.% Cr2O3, adding a dispersion medium and a binder to the obtained powdery mixture, kneading to form a slurry, spray- drying the slurry, forming the obtained granules and sintering the formed article in nitrogen atmosphere at 1,700-1,900 deg.C. |
