| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method for purifying dinitrogen monoxide for use in semiconductor manufacturing. SOLUTION: This system includes the first subsystem comprising a purification tank 106 holding liquid dinitrogen monoxide, a vaporizer 108 for vaporizing and connected with a product tank for returning dinitrogen monoxide vapor to the purification tank, a distillation column 104 set at distal end of the purification tank and a condenser 102 set on the distillation column. The second subsystem is set at downstream of the vaporizer and has a first drying bed container 110 reacting with acidic gas in the vapor and a second drying bed container 114 including molecular sieve for removing moisture and ammonia. The third subsystem has the product tank 118 recondensing purified dinitrogen monoxide, a liquid pump 120, a liquid filter 122 and a transporting manifold including a bypass distributing the purified dinitrogen monoxide to a container 124.
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