CONTAINER FOR FILLING ORGANIC SILANE COMPOUND AND PREVENTING METHOD FOR GENERATION OF SIO2 FINE POWDER

摘要

PROBLEM TO BE SOLVED: To provide a method for preventing the generation of particles composed of an SiO2 as a main component in a cylinder for an organic silane compound. SOLUTION: When an organic silane compound represented by the formula: SiHnR4-n (wherein n = a 0-3 integer and R = a functional group) is filled in a metal container, the finishing accuracy for the inner wall of the metal container and the inner wall of a valve attached on the metal container is 2S or more, and a method for preventing the generation of SiO2 fine powder after filling is provided for metal filling container.