发明名称 |
Self-aligned shield structure for realizing high frequency power MOSFET devices with improved reliability |
摘要 |
A high frequency power field effect transistor has a self-aligned gate-drain shield adjacent to the gate and overlying the drain. Fabrication of the structure does not require complex or costly processing and the resulting self-aligned shield structure minimizes increase to input and output capacitances. Hot carrier injection and related shifts are reduced thereby improving reliability of the transistor.
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申请公布号 |
US6222229(B1) |
申请公布日期 |
2001.04.24 |
申请号 |
US19990333123 |
申请日期 |
1999.06.14 |
申请人 |
CREE, INC. |
发明人 |
HEBERT FRANCOIS;NG SZEHIM |
分类号 |
H01L29/06;H01L29/40;H01L29/78;(IPC1-7):H01L29/76 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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