发明名称 APPARATUS AND METHOD FOR PRODUCING EXPOSURE DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To produce an exposure device of high quality for a short time. SOLUTION: A part of an apparatus for producing an exposure device is constituted so as to be made detachable from a main body. By this constitution, for example, during the curing period of an adhesive after the adhesion process of the exposure device is completed, the holding member for holding the exposure device is detached from the producing apparatus to attach a new holding member to the producing apparatus, the production of the exposure device can be performed up to the adhesion process, and the stop time of the producing apparatus is shortened or removed.</p>
申请公布号 JP2001113750(A) 申请公布日期 2001.04.24
申请号 JP19990300663 申请日期 1999.10.22
申请人 FUJITSU LTD 发明人 NAKAYASU TAKAFUMI;HOKI YOUYA;TAIRA YOSHIHIKO;NAGATOMI TSUTOMU
分类号 B41J2/44;B41J2/45;B41J2/455;H01L33/08;H01L33/58 主分类号 B41J2/44
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