FORMATION METHOD AND FORMATION APPARATUS FOR THIN FILM

摘要

PROBLEM TO BE SOLVED: To form an organic thin film with even thickness. SOLUTION: A transportation mechanism 180 moves a heater 110 in a prescribed direction. The heater 110 holds and heats a glass substrate 1, which is an object to be coated with an organic solution 2. A die 130 supplies an organic solution on the glass substrate 1 heated at a prescribed temperature. A sensor 130b measures a distance between the glass substrate 1 and the die 130. A controller 190 control a transportation mechanism 180 corresponding to the measurement result of the sensor 130b and moves the heater 110 at a prescribed speed while keeping the distance between the glass substrate 1 and the die 130 to apply the organic solution 2 to the glass substrate 1 and to form an organic thin film on the substrate.