| 摘要 |
PROBLEM TO BE SOLVED: To efficiently capture impurities contained in gas. SOLUTION: An impurities capturing device 30 has a chamber 31 for receiving gas flow, an intake pump 45 connected to the chamber 31 through a fluid system, an ultrasonic nebulizer 53 provided at the inlet part of the chamber 31, particles separation cylinders 35 and 39 provided at the fluid system and a liq. return pipe 47 for connecting the bottom part of the particles separation cylinder 35 and the ultrasonic nebulizer 53 and provided with a filter 49.
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