| 摘要 |
<p>A valve is formed from a silicon wafer (20). A position detector having a first electrical contact (54) formed on a glass support (32) mounted on the back face of the wafer (20), a second electrical contact fixed to the wafer (20) and a electrical impedance measurement circuit(resistance or capacitance according to the embodiment) between the two electrical contacts is provided to detect by contact the position of the valve and hence reveal any malfunction Useful in micropump for the injection of medicaments.</p> |
