发明名称
摘要 PROBLEM TO BE SOLVED: To provide a seasoning ring having sufficient strength, for smoothing a renewed abrasive cloth. SOLUTION: A seasoning ring 11 is shaped such that the function f(r) regarding the rate of the deposition of grinding grains 15 in the circular region of radii (r) up to ar0 from the center on the assumption that the circumference is one is formulated as follows: f(r)= r/(r0 <2> -r<2> )<1/2> }&times; (1-a)<1/2> /(1+a)<1/2> }, where r0 is the radius of the ring and (a) is more than 0.5 and less than one. The error allowance of the function f(r) is between -0.3 and +0.3. The whole circumference defined by (r) between ar0 and r0 may not necessarily have the grinding grains 15. The optimum deposition rate f(r) of the grinding grains 15 in the region defined by (r) between ar0 and r0 is between 0.9 and 1. The seasoning ring 11 thus formed can smooth a renewed abrasive cloth.
申请公布号 JP3159928(B2) 申请公布日期 2001.04.23
申请号 JP19960358298 申请日期 1996.12.26
申请人 发明人
分类号 B24D7/00;B24B53/00;B24B53/017;B24B53/12;B24D7/18;H01L21/304 主分类号 B24D7/00
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