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发明名称
摘要
申请公布号
JP3159977(B2)
申请公布日期
2001.04.23
申请号
JP19900035479
申请日期
1990.02.15
申请人
发明人
分类号
G01R31/28;G01R31/30;G01R31/3185;G11C29/00;G11C29/02;G11C29/06;G11C29/56;H01L21/66;H01L21/822;H01L21/98;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
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代理人
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地址
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