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发明名称
摘要
申请公布号
JP3159808(B2)
申请公布日期
2001.04.23
申请号
JP19920308598
申请日期
1992.11.18
申请人
发明人
分类号
H01L21/56;H01L21/60;H01L23/12;(IPC1-7):H01L21/56
主分类号
H01L21/56
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