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发明名称
MANUFACTURING A SEMICONDUCTOR DEVICE
摘要
申请公布号
IE811040(L)
申请公布日期
1981.11.14
申请号
IE19810001040
申请日期
1981.05.11
申请人
FUJITSU LTD
发明人
分类号
H01L21/268;H01L21/31;H01L21/321;H01L21/76;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/268
代理机构
代理人
主权项
地址
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