| 摘要 |
PURPOSE:To simultaneously execute both fluorescent X-ray analysis and X-ray diffraction analysis by providing an emitting device for emitting an X-ray containing plural kinds of characteristic X-rays mutually different in wavelength to a sample. CONSTITUTION:An X-ray tube (emitting device) 3 emits an X-ray B1 containing plural kinds of characteristic X-rays mutually different in wavelength such as RhKalpha-ray, RhKbeta-ray and RhLalpha-ray. In a sample 1 receiving the X-ray B1, the atoms are excited to generate a fluorescent X-ray B2 natural to the contained element, and the X-ray B1 is also partially diffracted as a diffracted X-ray B3 by the polycrystal of CaO. A first spectral element 4A spectrally diffracts the fluorescent X-ray B21 of the element to be measured, a second spectral element 4B spectrally diffracts the RhLalpha-ray (diffracted X-ray B3) which is a characteristic X-ray having a long wavelength. The spectrally diffracted fluorescent X-ray B21 and diffracted X-ray B3 are incident on first and second X-ray detectors 8A, 8B, respectively. |
