CLUSTER VALVE FOR SEMICONDUCTOR WAFER PROCESSOR

摘要

PROBLEM TO BE SOLVED: To provide a substitute which facilitates equipment maintenance by providing more fine design and thermal conduction between a chamber main body and an exhauster assembly. SOLUTION: A valve assembly 200 includes a valve main body 202 having an internal valve seat and plural adapter ports. Non-metallic sealing material provides vacuum sealing between mating faces of adjacent vacuum parts, and the physical direct contact between the mating faces secures favorable thermal conduction in the valve assembly.