| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak-inspecting device of an air filter for clean rooms where leak test is highly reliable. SOLUTION: In the leak-inspecting device that is provided with a particle detector 5, a suction probe 4 that is connected to the particle detector 5, and an X-Y drive mechanism for moving the suction probe 4 in X-Y directions flatly, where the suction probe 4 and the X-Y drive mechanism are mounted to the air blow-off surface of an air filter for usage, the air blow-off surface of an air filter(f) and the X-Y scanning surface of the suction probe 4 are in parallel, and a resistor 6 for obtaining pressure loss by preventing the passage of air being blown out of the air filter 4 is provided at the lower side of the X-Y scanning surface in parallel with the lower side.
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