| 摘要 |
PROBLEM TO BE SOLVED: To make both reduction of contamination for the specimen and observation of picture images with a high resolving power at low acceleration voltages compatible, with respect to contamination reducing device that is equipped in the specimen chamber of a scanning electron microscope and lowers contamination produced when sweeping a specimen disposed in vacuum with an electron beam even when the distance WD between the specimen and lower face of the objective lens is so small as about several mm that allows no space of inserting a cold trapping plate. SOLUTION: This is structured so as to equip a specimen, an object to display its picture image by detecting secondary electrons or the like generated by illuminating it with a finely focused electron beam, an objective lens that finely focuses the electron beam to illuminate the specimen surface, a circular or polygonal flat ring-shaped cold trap plate disposed at a position of distance W, above upper face of the said specimen, that is equal to or larger than the distance WD between the lower face of the objective lens and the specimen, and a cooling unit that is connected to the cold trap plate to cool it.
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