PATTERNING METHOD, PATTERNING APPARATUS AND TOOL USED THEREFOR

摘要

PROBLEM TO BE SOLVED: To form a high precision pattern with low cost machining by using a tool. SOLUTION: The tip part 3a of a tool 3 is pressed against the outline position 5a of the pattern 5 of a patterning object layer 2. The tool 2 and a board 1 are relatively moved in a direction along the outline position 5a with the posture of the tool 3 so as to have the spread of the tool 3 on the back side of a normal 7 from the pressing point of the tap 3a larger than the spread of the tool 3 on the pattern side of the normal 7, the background part 6 of the patterning object layer 2 along the outline position 5a is removed to leave the pattern part 5, and a predetermined pattern is formed.