Fremgangsmåte og anordning for mekanisk bearbeiding av arbeidsstykker og for montering og demontering av moduler

摘要

A method and an apparatus for performing mechanical operations on a workpiece secured on a first member for movement relative to a second member in at least one of three orthogonal directions at a precision in the mum range. Selectively energizable magnets are provided between the first and second members cause the first member to assume a floating state relative to the second member and to provide such movement. The second member is provided with a chamber for receiving the first member and is with openings for the controlled flow of pressurized fluid to augment the action of the magnets.