发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To obtain a new photosensitive resin composition having high sensitivity and excellent in developability and residual film properties. SOLUTION: In a photosensitive resin composition containing a photosensitive material and a resin, two or more resins having a refractive index difference of >=0.03 are used so as to enhance the sensitivity of the composition by utilizing a light scattering phenomenon in the composition. The two or more resins having a refractive index difference of >=0.03 may be a combination of a novolak resin and a polymethacrylate such as polymethyl methacrylate.
申请公布号 JP2001109147(A) 申请公布日期 2001.04.20
申请号 JP19990286418 申请日期 1999.10.07
申请人 CLARIANT (JAPAN) KK 发明人 TAKAHASHI SHUICHI
分类号 H01L21/027;G03F7/023;G03F7/032 主分类号 H01L21/027
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