| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a capacitance-type force/torque sensor requiring only little troublesome assembling work, and allowing easy waterproof and dustproof measures without increasing the number of components. SOLUTION: This force/torque sensor has a substrate 1 formed with a group of fixed electrodes Dx+, Dx-, Dy+, Dy-, Dz+, and a moving plate 2 of an elastomer having a moving electrode D attached or impregnated with an electroconductive ink or electroconductive paint (deposited with an electroconductive metal) on a surface facing the fixed electrodes Dx+, Dx-, Dy+, Dy-, Dz+. The fixed electrodes Dx+, Dx-, Dy+, Dy-, Dz+ and the moving electrode D constitute plural variable capacitance parts Cx+, Cx-, Cy+, Cy-, Cz+. Electrostatic capacities of the respective variable capacitance parts Cx+, Cx-, Cy+, Cy-, Cz+ vary according to a magnitude and direction of force applied to the moving plate 2.</p> |
