MOTOR, STAGE, EXPOSING APPARATUS, AND DRIVE CONTROL METHOD FOR MOTOR

摘要

PROBLEM TO BE SOLVED: To provide a motor for driving an object in the two-dimensional direction through a simple arrangement. SOLUTION: Through electromagnetic interaction between a current fed to an armature coil 46 in an armature unit 45 and a field generated from a first pole unit 63, a force for relatively driving the armature unit 45 and the first pole unit 63 in the first direction (X axis direction) is generated and through electromagnetic interaction between a current fed to the armature coil 46 and a field generated from a second pole unit 83, a force for relatively driving the armature unit 45 and the second pole unit 83 in the second direction (Y axis direction) is generated. Consequently, two-dimensional driving is achieved not through an intricate two stage arrangement but through one stage arrangement.