| 摘要 |
PROBLEM TO BE SOLVED: To provide astigmatism correction device of electron microscope that can exactly correct astigmatism in electron microscope within a short time without demand for operator's experience and dexterity. SOLUTION: Radial signal R and a plurality of angular signalsθare entered at the reference value (X0, Y0) in a polar coordinate selection/correction circuit 15, display images 11b1 to 11b8 for each angular signal at corrected coordinates are displayed with an astigmatism correction device 20 according to instructions of a control circuit 17, astigmatism correction is exactly conducted by selecting a displayed image of astigmatism satisfiable with visual decision and finely adjusting at least either radius or angle as occasion calls, or high-quality astigmatism correction is conducted with readjustment using selected and specified value (R,θ) as the reference, and high-quality astigmatism correction at a middle position of adjacent display images of astigmatism correction to a similar extent is conducted in intuitive correspondence to the displayed image by a simple operation directed with the angular coordinate.
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