SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To achieve image observation at a high resolution and obtain information of unevenness of the specimen. SOLUTION: Image of a specimen is formed by detecting reflected electrons 12a emitted in directions making a small angles with respect to face of the specimen by detectors 10a and 10b disposed at the side of an electron source 1 of an objective lens 7 of magnetic field leakage type. Ruggedness information of the specimen is obtained from contrasting shadows appearing on the specimen image.