TEST PIECE PROCESSING METHOD, APPARATUS THEREFOR, AND METHOD FOR MANUFACTURE OF MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To provide a test piece processing method, apparatus and manufacturing method for magnetic head without such a post processing as removal of corrosion products only by corrosion treatment residual chroline component by plasma process. SOLUTION: Laminated layers are formed by a seed layer of NiFe alloy, an upper magnetic pole of NiFe alloy connected with the seed layer, a gap layer of an oxide layer adhered to the seed layer, and a seed layer of NiFe alloy adhered to the gap layer. The seed layer is etched by means of plasma process using gas including chroline with the upper magnetic pole as a mask. Residual chlorine component is removed by plasma tail-end process using plasma including H2O or methanol.