发明名称 DRYING DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent breakage of a substance to be dried during rotation of a rotor. SOLUTION: A carrier 31 is rotatably situated on a rotor 21 rotatably situated in a chamber 2, and the rotor 21 is provided with a damper 33 to make contact with a part of the carrier 31 and press the carrier 31 in the opening direction of the chamber 2. When the carrier 31 is rotated and positioned in the rotor 21 and the carrier 31 is rotated integrally with the rotor 21, the carrier 31 is moved in a direction in which the carrier 31 approaches a line paralleling the rotary axis of the rotor 21 against the press force of the damper 33 according to the magnitude of a central force. The surface of a substance 40 to be dried is contained in the carrier 31 approaches a horizontal line extending orthogonally to the rotary axis of the rotor 21, application of a load on the surface part of the substance 40 to be dried is blocked, and breakage of the substance 40 to be dried is blocked.
申请公布号 JP2001108361(A) 申请公布日期 2001.04.20
申请号 JP19990281786 申请日期 1999.10.01
申请人 SPEEDFAM CLEAN SYSTEM KK 发明人 FUKUMURA MASATO;TERUI YOSHINOBU
分类号 F26B5/08;F26B11/08;(IPC1-7):F26B5/08 主分类号 F26B5/08
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