| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a ceramic substrate which has superior temperature controllability, temperature rising/dropping characteristic, or vacuum-chucking characteristic and can be connected highly reliably to external terminals. SOLUTION: A ceramic substrate is constituted in such a way that conductors like platy heating elements composed of a conductive ceramic are buried in the substrate and, at the same time, connection pads for connecting external terminals are provided on one surface of the conductor. In addition, the connection pads are formed of a metal, such as tungsten, molybdenum, platinum, etc., having a high melting point.</p> |
