| 摘要 |
<p>PROBLEM TO BE SOLVED: To keep a processing focus of a laser beam just by a simple constitution. SOLUTION: In a manufacturing device for obtaining a thin-film solar cell by subjecting a thin film laminated on one side of a translucent insulating substrate 1 to the patterning with a laser beam 16 projected into the substrate 1 from the opposite side of the thin-film forming plane, a stage 14 where the substrate 1 is placed is constituted so as to support only a marginal part of the substrate, and a holding mechanism 100 which holds the substrate 1 placed on the stage 14 is arranged, thereby correcting deflection or warp of the substrate 1 placed on the stage 14.</p> |
