| 摘要 |
PROBLEM TO BE SOLVED: To provide a ladder type piezoelectric ceramic filter by preparing piezoelectric elements for fetching electric signals with different frequencies by a simple method, and combining and forming them in a ladder type. SOLUTION: Sacrificial layers made of materials to enable etching such as zinc oxide with different thickness are formed by a sputtering method or the like on a silicon substrate, and a reinforcing layer is formed, and a lower electrode layer made of platinum or the like is formed. Then, sol-gel solution containing piezoelectric ceramic materials such as titanic acid zircon acid lead system is applied and sintered so that a piezoelectric ceramic layer can be formed. Afterwards, an upper electrode layer made of platinum is fomred by the sputtering method or the like, and the sacrificial layer is removed so that the piezoelectric ceramics layer whose thickness is different can be formed on the same substrate. Then, polarization treatment is carried out so that piezoelectric elements can be manufactured. The piezoelectric elements are combined and formed in a ladder type so that a ladder type piezoelectric ceramic filter can be obtained.
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